Deadlock-free scheduling method for track systems in semiconductor fabrication

Hyun Joong Yoon, Doo Yong Lee. Deadlock-free scheduling method for track systems in semiconductor fabrication. In Proceedings of the IEEE International Conference on Systems, Man & Cybernetics: "Cybernetics Evolving to Systems, Humans, Organizations, and their Complex Interactions", Sheraton Music City Hotel, Nashville, Tennessee, USA, 8-11 October 2000. pages 1787-1792, IEEE, 2000. [doi]

Abstract

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