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Jun-Sik Yoon, Seunghwan Lee, Junjong Lee, Jinsu Jeong, Hyeok Yun, Bohyeon Kang, Rock-Hyun Baek. Source/Drain Patterning FinFETs as Solution for Physical Area Scaling Toward 5-nm Node. IEEE Access, 7:172290-172295, 2019. [doi]
Abstract is missing.