Characterization of Ultrathin Gate Dielectrics for Nanoscale CMOS Applications

Gi-Wan Yoon, Linh Mai, Jae Young Lee. Characterization of Ultrathin Gate Dielectrics for Nanoscale CMOS Applications. J. Inform. and Commun. Convergence Engineering, 5(2):109-111, 2007. [doi]

Abstract

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