Hierarchical indices to detect equipment condition changes with high dimensional data for semiconductor manufacturing

Hui-Chun Yu, Kuo-Yi Lin, Chen-Fu Chien. Hierarchical indices to detect equipment condition changes with high dimensional data for semiconductor manufacturing. J. Intelligent Manufacturing, 25(5):933-943, 2014. [doi]

Authors

Hui-Chun Yu

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Kuo-Yi Lin

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Chen-Fu Chien

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