Hui-Chun Yu, Kuo-Yi Lin, Chen-Fu Chien. Hierarchical indices to detect equipment condition changes with high dimensional data for semiconductor manufacturing. J. Intelligent Manufacturing, 25(5):933-943, 2014. [doi]
@article{YuLC14-1,
title = {Hierarchical indices to detect equipment condition changes with high dimensional data for semiconductor manufacturing},
author = {Hui-Chun Yu and Kuo-Yi Lin and Chen-Fu Chien},
year = {2014},
doi = {10.1007/s10845-013-0785-3},
url = {http://dx.doi.org/10.1007/s10845-013-0785-3},
researchr = {https://researchr.org/publication/YuLC14-1},
cites = {0},
citedby = {0},
journal = {J. Intelligent Manufacturing},
volume = {25},
number = {5},
pages = {933-943},
}