Development of micro/nano displacement sensor for piezoelectric actuator

Yong Yu, Bo Song, YunJian Ge. Development of micro/nano displacement sensor for piezoelectric actuator. In 2009 IEEE/RSJ International Conference on Intelligent Robots and Systems, October 11-15, 2009, St. Louis, MO, USA. pages 3290-3296, IEEE, 2009. [doi]

Abstract

Abstract is missing.