A new CMOS stress sensor ratiometric readout for in-plane stress magnitude and angle detection

Zili Yu, Cor Scherjon, Yigit Mahsereci, Joachim N. Burghartz. A new CMOS stress sensor ratiometric readout for in-plane stress magnitude and angle detection. In 2017 IEEE SENSORS, Glasgow, United Kingdom, October 29 - November 1, 2017. pages 1-3, IEEE, 2017. [doi]

@inproceedings{YuSMB17,
  title = {A new CMOS stress sensor ratiometric readout for in-plane stress magnitude and angle detection},
  author = {Zili Yu and Cor Scherjon and Yigit Mahsereci and Joachim N. Burghartz},
  year = {2017},
  doi = {10.1109/ICSENS.2017.8234135},
  url = {https://doi.org/10.1109/ICSENS.2017.8234135},
  researchr = {https://researchr.org/publication/YuSMB17},
  cites = {0},
  citedby = {0},
  pages = {1-3},
  booktitle = {2017 IEEE SENSORS, Glasgow, United Kingdom, October 29 - November 1, 2017},
  publisher = {IEEE},
  isbn = {978-1-5090-1012-7},
}