Zili Yu, Cor Scherjon, Yigit Mahsereci, Joachim N. Burghartz. A new CMOS stress sensor ratiometric readout for in-plane stress magnitude and angle detection. In 2017 IEEE SENSORS, Glasgow, United Kingdom, October 29 - November 1, 2017. pages 1-3, IEEE, 2017. [doi]
Abstract is missing.