Quantitative Evaluation of Line-Edge Roughness in Various FinFET Structures: Bayesian Neural Network With Automatic Model Selection

Sangho Yu, Sang Min Won, Hyoung Won Baac, Donghee Son, Changhwan Shin. Quantitative Evaluation of Line-Edge Roughness in Various FinFET Structures: Bayesian Neural Network With Automatic Model Selection. IEEE Access, 10:26340-26346, 2022. [doi]

Abstract

Abstract is missing.