Controller design and optimal tuning of a wafer handling robot

Xiaowen Yu, Cong Wang, Yu Zhao, Masayoshi Tomizuka. Controller design and optimal tuning of a wafer handling robot. In IEEE International Conference on Automation Science and Engineering, CASE 2015, Gothenburg, Sweden, August 24-28, 2015. pages 640-646, IEEE, 2015. [doi]

@inproceedings{YuWZT15,
  title = {Controller design and optimal tuning of a wafer handling robot},
  author = {Xiaowen Yu and Cong Wang and Yu Zhao and Masayoshi Tomizuka},
  year = {2015},
  doi = {10.1109/CoASE.2015.7294150},
  url = {http://dx.doi.org/10.1109/CoASE.2015.7294150},
  researchr = {https://researchr.org/publication/YuWZT15},
  cites = {0},
  citedby = {0},
  pages = {640-646},
  booktitle = {IEEE International Conference on Automation Science and Engineering, CASE 2015, Gothenburg, Sweden, August 24-28, 2015},
  publisher = {IEEE},
  isbn = {978-1-4673-8183-3},
}