Mingzhi Yu, Libo Zhao, Weile Jiang, Chen Jia, Zhikang Li, Yulong Zhao, Zhuangde Jiang. A Two-Axis MEMS Piezoresistive In-Plane Accelerometer with Pure Axially Deformed Microbeams. In 2018 IEEE SENSORS, New Delhi, India, October 28-31, 2018. pages 1-4, IEEE, 2018. [doi]
Abstract is missing.