Hyeonjun Yun, Hyeseon Kwon, Sangsu Yeh, Minsu Lee, Jonghwa Kim, Yunha Kim, Seungwoo Cha, Mingu Kang, Jooyeop Nam. High-Speed Wafer Temperature Control Approach of Step Chiller for Semiconductor Manufacturing Equipment. In 49th Annual Conference of the IEEE Industrial Electronics Society, IECON 2023, Singapore, October 16-19, 2023. pages 1-6, IEEE, 2023. [doi]
Abstract is missing.