Tanju Yurtsever, Erhan Kutanoglu, Jennifer Johns. Heuristic based Scheduling System for Diffusion in Semiconductor Manufacturing. In Ann Dunkin, Ricki G. Ingalls, Enver Yücesan, Manuel D. Rossetti, Ray Hill, Björn Johansson, editors, Proceedings of the 2009 Winter Simulation Conference, WSC 2009, Hilton Austin Hotel, Austin, TX, USA, December 13-16, 2009. pages 1677-1685, WSC, 2009. [doi]
Abstract is missing.