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Packaging influences on the reliability of MEMS resonators

J. J. M. Zaal, W. D. van Driel, S. Bendida, Q. Li, J. T. M. van Beek, G. Q. Zhang. Packaging influences on the reliability of MEMS resonators. Microelectronics Reliability, 48(8-9):1567-1571, 2008. [doi]

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J. J. M. Zaal

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W. D. van Driel

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S. Bendida

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Q. Li

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J. T. M. van Beek

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G. Q. Zhang

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