2-D Vertical Filament Capacitive Sensor for the Measurement in Vacuum Environment

Tao Zeng, Yunfeng Lu, Le Chen, Yaqiong Fu, Suan Xu. 2-D Vertical Filament Capacitive Sensor for the Measurement in Vacuum Environment. IEEE T. Instrumentation and Measurement, 67(10):2382-2389, 2018. [doi]

Abstract

Abstract is missing.