Experimental Study of pre-Stressed Micromechanical anti-Spring Structures

Hongcai Zhang, Yuxing Duan, Yang Gao, Xueyong Wei. Experimental Study of pre-Stressed Micromechanical anti-Spring Structures. In 2019 IEEE SENSORS, Montreal, QC, Canada, October 27-30, 2019. pages 1-4, IEEE, 2019. [doi]

Abstract

Abstract is missing.