Thin Film Strain Sensors with Significantly Improved Piezoresistive Stability at High Temperatures by Introducing Insulating Phase

Tao Zhang, Yilin Fan, Yu Lei, Xingxu Zhang, Jian Luo, Jinjun Deng, Tao Ye, Binghe Ma. Thin Film Strain Sensors with Significantly Improved Piezoresistive Stability at High Temperatures by Introducing Insulating Phase. In 2024 IEEE SENSORS, Kobe, Japan, October 20-23, 2024. pages 1-4, IEEE, 2024. [doi]

Abstract

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