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A Rapid Dynamic Positioning Method for Settling Time Reduction Through a Macro-Micro Composite Stage With High Positioning Accuracy

Lanyu Zhang, Jian Gao, Xin Chen. A Rapid Dynamic Positioning Method for Settling Time Reduction Through a Macro-Micro Composite Stage With High Positioning Accuracy. IEEE Transactions on Industrial Electronics, 65(6):4849-4860, 2018. [doi]

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