Design of a graphene capacitive pressure sensor for ultra-low pressure detection

Yangxi Zhang, Yiming Gui, Fanrui Meng, Chengchen Gao, Yilong Hao. Design of a graphene capacitive pressure sensor for ultra-low pressure detection. In 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016. pages 192-195, IEEE, 2016. [doi]

@inproceedings{ZhangGMGH16,
  title = {Design of a graphene capacitive pressure sensor for ultra-low pressure detection},
  author = {Yangxi Zhang and Yiming Gui and Fanrui Meng and Chengchen Gao and Yilong Hao},
  year = {2016},
  doi = {10.1109/NEMS.2016.7758230},
  url = {https://doi.org/10.1109/NEMS.2016.7758230},
  researchr = {https://researchr.org/publication/ZhangGMGH16},
  cites = {0},
  citedby = {0},
  pages = {192-195},
  booktitle = {11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016},
  publisher = {IEEE},
  isbn = {978-1-5090-1947-2},
}