Yangxi Zhang, Yiming Gui, Fanrui Meng, Chengchen Gao, Yilong Hao. Design of a graphene capacitive pressure sensor for ultra-low pressure detection. In 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016. pages 192-195, IEEE, 2016. [doi]
Abstract is missing.