Thermal radiation sensing using high mechanical Q-factor silicon nitride membranes

Chang Zhang, Mathieu Giroux, Théa Abdul Nour, Raphael St-Gelais. Thermal radiation sensing using high mechanical Q-factor silicon nitride membranes. In 2019 IEEE SENSORS, Montreal, QC, Canada, October 27-30, 2019. pages 1-4, IEEE, 2019. [doi]

Authors

Chang Zhang

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Mathieu Giroux

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Théa Abdul Nour

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Raphael St-Gelais

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