Thermal radiation sensing using high mechanical Q-factor silicon nitride membranes

Chang Zhang, Mathieu Giroux, Théa Abdul Nour, Raphael St-Gelais. Thermal radiation sensing using high mechanical Q-factor silicon nitride membranes. In 2019 IEEE SENSORS, Montreal, QC, Canada, October 27-30, 2019. pages 1-4, IEEE, 2019. [doi]

Abstract

Abstract is missing.