Huai Zhang, Zhibin Jiang, Chengtao Guo, Huiran Liu. An Extended Object-oriented Petri Nets Modeling Based Simulation Platform for Real-time Scheduling of Semiconductor Wafer Fabrication System. In Proceedings of the IEEE International Conference on Systems, Man and Cybernetics, Taipei, Taiwan, October 8-11, 2006. pages 3411-3416, IEEE, 2006. [doi]
Abstract is missing.