Bo Zhang, Yong Jiang, Yang Li, Xiaoli Chen, Xiaolong Wen. Design and Development of High Precision Magnetic Encoder Based on TMR MEMS Device. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 474-479, IEEE, 2021. [doi]
Abstract is missing.