A Reinforcement Learning Approach for Improved Photolithography Schedules - researchr publication authors

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Tao Zhang 0044, Kamil Erkan Kabak, Cathal Heavey, Oliver Rose. A Reinforcement Learning Approach for Improved Photolithography Schedules. In Winter Simulation Conference, WSC 2023, San Antonio, TX, USA, December 10-13, 2023. pages 2136-2147, IEEE, 2023. [doi]

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