Tao Zhang 0044, Kamil Erkan Kabak, Cathal Heavey, Oliver Rose. A Reinforcement Learning Approach for Improved Photolithography Schedules. In Winter Simulation Conference, WSC 2023, San Antonio, TX, USA, December 10-13, 2023. pages 2136-2147, IEEE, 2023. [doi]
@inproceedings{ZhangKHR23,
title = {A Reinforcement Learning Approach for Improved Photolithography Schedules},
author = {Tao Zhang 0044 and Kamil Erkan Kabak and Cathal Heavey and Oliver Rose},
year = {2023},
doi = {10.1109/WSC60868.2023.10408616},
url = {https://doi.org/10.1109/WSC60868.2023.10408616},
researchr = {https://researchr.org/publication/ZhangKHR23},
cites = {0},
citedby = {0},
pages = {2136-2147},
booktitle = {Winter Simulation Conference, WSC 2023, San Antonio, TX, USA, December 10-13, 2023},
publisher = {IEEE},
isbn = {979-8-3503-6966-3},
}