Finite element analysis and optimization of temperature field in GaN-MOCVD reactor

JinCheng Zhang, Zhiming Li, Yue Hao, Hao Wang, Peixian Li. Finite element analysis and optimization of temperature field in GaN-MOCVD reactor. Science in China Series F: Information Sciences, 53(10):2138-2143, 2010. [doi]

Authors

JinCheng Zhang

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Zhiming Li

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Yue Hao

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Hao Wang

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Peixian Li

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