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Improvement of the architecture for MEMS resonator quality factor measurement

Ming Zhang, Nicolas Llaser, Hervé Mathias. Improvement of the architecture for MEMS resonator quality factor measurement. In 15th IEEE International Conference on Electronics, Circuits and Systems, ICECS 2008, St. Julien's, Malta, August 31 2008-September 3, 2008. pages 255-258, IEEE, 2008. [doi]

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