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Design and Finite Element Simulation of a Novel 3D-CMUT Device for Simultaneous Sensing of In-Plane and Out-of-Plane Displacements of Ultrasonic Guided Waves

Sai Zhang, Wei Lu, Ailing Wang, Guodong Hao, Renxing Wang, Mehmet Yilmaz. Design and Finite Element Simulation of a Novel 3D-CMUT Device for Simultaneous Sensing of In-Plane and Out-of-Plane Displacements of Ultrasonic Guided Waves. Sensors, 23(21):8706, October 2023. [doi]

Authors

Sai Zhang

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Wei Lu

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Ailing Wang

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Guodong Hao

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Renxing Wang

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Mehmet Yilmaz

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