Design and Finite Element Simulation of a Novel 3D-CMUT Device for Simultaneous Sensing of In-Plane and Out-of-Plane Displacements of Ultrasonic Guided Waves

Sai Zhang, Wei Lu, Ailing Wang, Guodong Hao, Renxing Wang, Mehmet Yilmaz. Design and Finite Element Simulation of a Novel 3D-CMUT Device for Simultaneous Sensing of In-Plane and Out-of-Plane Displacements of Ultrasonic Guided Waves. Sensors, 23(21):8706, October 2023. [doi]

Abstract

Abstract is missing.