Kaisheng Zhang, Wenbo Luo, Tao Wang, Jing Yang, Yupeng Yuan, Zuwei Zhang, Yao Shuai, Chuangui Wu, Wanli Zhang. Gas chamber and thermal isolation structure simulation for an integrated NDIR gas sensor. In 15th IEEE International Conference on Nano/Micro Engineered and Molecular System, NEMS 2020, San Diego, CA, USA, September 27-30, 2020. pages 338-341, IEEE, 2020. [doi]
Abstract is missing.