Parylene C autofluorescence for on-chip highest processing temperature sensing

Lingqian Zhang, Yaoping Liu, Fang Yang, Wei Wang, Dacheng Zhang, Zhihong Li. Parylene C autofluorescence for on-chip highest processing temperature sensing. In 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Xi'an, China, April 7-11, 2015. pages 302-305, IEEE, 2015. [doi]

Authors

Lingqian Zhang

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Yaoping Liu

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Fang Yang

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Wei Wang

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Dacheng Zhang

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Zhihong Li

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