Parylene C autofluorescence for on-chip highest processing temperature sensing

Lingqian Zhang, Yaoping Liu, Fang Yang, Wei Wang, Dacheng Zhang, Zhihong Li. Parylene C autofluorescence for on-chip highest processing temperature sensing. In 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Xi'an, China, April 7-11, 2015. pages 302-305, IEEE, 2015. [doi]

Abstract

Abstract is missing.