Layout Decomposition with Pairwise Coloring and Adaptive Multi-Start for Triple Patterning Lithography

Ye Zhang, Wai-Shing Luk, Yunfeng Yang, Hai Zhou, Changhao Yan, David Z. Pan, Xuan Zeng. Layout Decomposition with Pairwise Coloring and Adaptive Multi-Start for Triple Patterning Lithography. ACM Trans. Design Autom. Electr. Syst., 21(1):2, 2015. [doi]

Abstract

Abstract is missing.