Tengfei Zhang, Zhipeng Ma, Yiming Jin, Ziyi Ye, Xudong Zheng, Zhonghe Jin. Temperature drift compensation of a tuned low stiffness MEMS accelerometer based on double-sided parallel plates. In 17th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2022, Taoyuan, Taiwan, April 14-17, 2022. pages 249-252, IEEE, 2022. [doi]
Abstract is missing.