Semiconductor wafer fabrication production planning using multi-fidelity simulation optimisation

Fan Zhang, Jie Song 0002, Yingzhuo Dai, Jie Xu 0004. Semiconductor wafer fabrication production planning using multi-fidelity simulation optimisation. Int. J. Prod. Res., 58(21):6585-6600, 2020. [doi]

Abstract

Abstract is missing.