Investigation of Channel Dimension Dependence of BTI Degradation and Variation in Planar HKMG MOSFET

S. Q. Zhang, Y. S. Sun, D. Gao, H. Jiang, Z. Q. Yu, H. Zheng, J.-L. Huang. Investigation of Channel Dimension Dependence of BTI Degradation and Variation in Planar HKMG MOSFET. In IEEE International Reliability Physics Symposium, IRPS 2023, Monterey, CA, USA, March 26-30, 2023. pages 1-4, IEEE, 2023. [doi]

Authors

S. Q. Zhang

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Y. S. Sun

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D. Gao

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H. Jiang

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Z. Q. Yu

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H. Zheng

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J.-L. Huang

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