Tao Zhang, Lei Sun, Dedong Han, Yi Wang, Ruqi Han. Surface uniform wet etching of ZnO films and influence of oxygen annealing on etching properties. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 626-629, IEEE, 2011. [doi]
Abstract is missing.