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A wafer-level 3D integrated T/R microsystem with 0.5-wavelength self-matching connectors

Shengchang Zhang, Guangbao Shan, Yi Luo, Hui Deng. A wafer-level 3D integrated T/R microsystem with 0.5-wavelength self-matching connectors. Microelectronics Journal, 153:106421, 2024. [doi]

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