A Numerical Simulation of Motion of Particles under the Wafer in CMP - researchr publication authors

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Hao Zhang, Yuanqiang Tan, Mingjun Li. A Numerical Simulation of Motion of Particles under the Wafer in CMP. In International Conference on Computer Science and Software Engineering, CSSE 2008, Volume 3: Grid Computing / Distributed and Parallel Computing / Information Security, December 12-14, 2008, Wuhan, China. pages 31-34, IEEE Computer Society, 2008. [doi]

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