Hao Zhang, Yuanqiang Tan, Mingjun Li. A Numerical Simulation of Motion of Particles under the Wafer in CMP. In International Conference on Computer Science and Software Engineering, CSSE 2008, Volume 3: Grid Computing / Distributed and Parallel Computing / Information Security, December 12-14, 2008, Wuhan, China. pages 31-34, IEEE Computer Society, 2008. [doi]
@inproceedings{ZhangTL08,
title = {A Numerical Simulation of Motion of Particles under the Wafer in CMP},
author = {Hao Zhang and Yuanqiang Tan and Mingjun Li},
year = {2008},
doi = {10.1109/CSSE.2008.463},
url = {http://dx.doi.org/10.1109/CSSE.2008.463},
researchr = {https://researchr.org/publication/ZhangTL08},
cites = {0},
citedby = {0},
pages = {31-34},
booktitle = {International Conference on Computer Science and Software Engineering, CSSE 2008, Volume 3: Grid Computing / Distributed and Parallel Computing / Information Security, December 12-14, 2008, Wuhan, China},
publisher = {IEEE Computer Society},
isbn = {978-0-7695-3336-0},
}