Songsong Zhang, Tao Wang, Chengkuo Lee, Liang Lou, Wei Mong Tsang, Dim-Lee Kwong. Silicon Nanowires embedded pressure sensor with annularly grooved diaphragm for sensitivity improvement. In 2014 IEEE Ninth International Conference on Intelligent Sensors, Sensor Networks and Information Processing (ISSNIP), Singapore, April 21-24, 2014. pages 1-6, IEEE, 2014. [doi]
@inproceedings{ZhangWLLTK14,
title = {Silicon Nanowires embedded pressure sensor with annularly grooved diaphragm for sensitivity improvement},
author = {Songsong Zhang and Tao Wang and Chengkuo Lee and Liang Lou and Wei Mong Tsang and Dim-Lee Kwong},
year = {2014},
doi = {10.1109/ISSNIP.2014.6827620},
url = {http://dx.doi.org/10.1109/ISSNIP.2014.6827620},
researchr = {https://researchr.org/publication/ZhangWLLTK14},
cites = {0},
citedby = {0},
pages = {1-6},
booktitle = {2014 IEEE Ninth International Conference on Intelligent Sensors, Sensor Networks and Information Processing (ISSNIP), Singapore, April 21-24, 2014},
publisher = {IEEE},
}