Preparation and performance study of TiN films deposited by MF unbalanced magnetron sputtering technique

Y. C. Zhang, Y. F. Wu, S. G. Ma, S. N. Sun, Y. Zhou, M. Geng. Preparation and performance study of TiN films deposited by MF unbalanced magnetron sputtering technique. IJCAT, 29(2/3/4):173-177, 2007. [doi]

Abstract

Abstract is missing.