Qiuping Zhang, Li Wen, Weiwei Xiang, Jiaru Chu. Fabrication and performance of Microplasma Reactor for maskless scanning plasma etching. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 211-214, IEEE, 2010. [doi]
Abstract is missing.