Modeling and noise analysis of a fence structure micromachined capacitive accelerometer system

Xia Zhang, Hao Wang, Xu-dong Zheng, Shi-chang Hu, Zhong-he Jin. Modeling and noise analysis of a fence structure micromachined capacitive accelerometer system. Journal of Zhejiang University - Science C, 11(12):1009-1015, 2010. [doi]

Abstract

Abstract is missing.