Design and modeling of a novel 3-DOF large-travel parallel micro/nano-positioning stage

Xiaozhi Zhang, Qingsong Xu. Design and modeling of a novel 3-DOF large-travel parallel micro/nano-positioning stage. In IECON 2017 - 43rd Annual Conference of the IEEE Industrial Electronics Society, Beijing, China, October 29 - November 1, 2017. pages 2840-2845, IEEE, 2017. [doi]

Abstract

Abstract is missing.