A Si-Glass based pressure sensor with a single piezoresistive element for harsh environment applications

Hong Zhang, Huiming Xu, Yan Li, Zijun Song, Haisheng San, Yuxi Yu. A Si-Glass based pressure sensor with a single piezoresistive element for harsh environment applications. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 348-351, IEEE, 2013. [doi]

Authors

Hong Zhang

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Huiming Xu

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Yan Li

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Zijun Song

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Haisheng San

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Yuxi Yu

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