A MEMS inertial switch with compact constraint structures for lowering off-axis sensitivity

Qihuan Zhang, Zhuoqing Yang, Qiu Xu, Mengyuan Zhao, Jinyuan Yao, Guifu Ding, Xiaolin Zhao. A MEMS inertial switch with compact constraint structures for lowering off-axis sensitivity. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]

@inproceedings{ZhangYXZYDZ16,
  title = {A MEMS inertial switch with compact constraint structures for lowering off-axis sensitivity},
  author = {Qihuan Zhang and Zhuoqing Yang and Qiu Xu and Mengyuan Zhao and Jinyuan Yao and Guifu Ding and Xiaolin Zhao},
  year = {2016},
  doi = {10.1109/ICSENS.2016.7808428},
  url = {https://doi.org/10.1109/ICSENS.2016.7808428},
  researchr = {https://researchr.org/publication/ZhangYXZYDZ16},
  cites = {0},
  citedby = {0},
  pages = {1-3},
  booktitle = {2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016},
  publisher = {IEEE},
  isbn = {978-1-4799-8287-5},
}