Yinan Zhang, Ruixue Zhang, Haoyu Gu, Bin Zhou, Qi Wei 0001, Rong Zhang 0005. Achieving Submicron Sphericity in Bowl-Shaped Micro Hemispherical Resonators Through Precision Molding Process. In 2023 IEEE SENSORS, Vienna, Austria, October 29 - Nov. 1, 2023. pages 1-4, IEEE, 2023. [doi]
Abstract is missing.