Litho-AsymVnet: super-resolution lithography modeling with an asymmetric V-net architecture

Qing Zhang, Yuhang Zhang, Wei Lu, Huajie Huang, Zheng Zhong, Congshu Zhou, Yongfu Li. Litho-AsymVnet: super-resolution lithography modeling with an asymmetric V-net architecture. Science in China Series F: Information Sciences, 66(12), December 2023. [doi]

Authors

Qing Zhang

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Yuhang Zhang

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Wei Lu

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Huajie Huang

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Zheng Zhong

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Congshu Zhou

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Yongfu Li

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